CMT-SR2000N

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Description

4 Point Probe System / Sheet resistance system

 

Fully automatic system to measure Sheet Resistance and Resistivity of Silicon Wafer.  This system can be operated by itself, furthermore, perfect remote control is available using a PC and exclusive software, and it gives various data analyses.

 

 

 

 

1. Features  
XYZ-axis fully automatic system  
Auto & Manual range selection  
Systems for 8" wafer (SR2000N-PV : 156X156mm)  
Perfect remote control by operating software  
Data analysis (2D, 3D map, Data map, etc.)    
ASTM & SEMI quick measurement mode    
2. Configuration    
  The system consists of the following components.    
4-point probe head unit    
Z-axis robot arm    
Revolution sample stage chuck (XY-axis)    
Membrane keyboard panel    
LCD display window    
Remote control communication port    
Vacuum hose connector (200mmHg)    
Software (Windows 98/XP/NT Ver.)    
Standard accessories    
  - Power cable 
- Remote control communication cable 
- Operating & service guide
   
3. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe (input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
   
Measurement accuracy    
  - ± 0.5 % (VLSI standard wafer, when 23°C)    
Four-point probe (Jandel Eng.)    
  - Pin spacing : 25 mils ∼ 50 mils by 5mil increments
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron∼500 microns (polished 2μ diamond)
- Tolerance : ± 0.01 mm
- Needles : Solid Tungsten Carbide φ0.40 mm
Operating software    
  - Measurement condition creation : Wafer type, measure point interval, etc. 
- Save & load : data, wafer type, measure point, etc.
- Data analysis : 2D, 3D mapping, data map, etc.
- On/Off : Remote, vacuum 
- Data & mapping printout
Measurement mode (S/W)    
  -Auto measurement : Point interval designation by user 
-Quick measurement : ASTM & SEMI mode
-Point measurement : Appointment on wafer by mouse 
-Manual measurement : Appointment on wafer by arrow key
4. Specimen    
Wafer : max 8" (SR2000N-PV : 156X156mm)    
5. Measuring time    
Approx. 3 ± 1 sec/point    
6. Software [Windows 98/XP/NT(Service Pack 4.0)]
Operating personal computer : IBM PC/AT compatible PENTIUM∼
Serial Communication(RS232C)
7. Utility requirements    
Power requirements (1 Line)    
  - Line voltage : AC 110V or 220V ± 10% 
- Electric power : 40 W, 500 mA 
- Line frequency : 50 / 60 Hz

 

   
Stage chuck vacuum requirements (1 Line)    
  - Vacuum : About 200mmHg (1 Line)
- Vacuum hose : Urethane 4mm 
   
8. Outside Dimension    
SR2000N : 254mm(W)×562mm(D)×250mm(H) SR2000N-PV : 270mm(W)×610mm(D)×280mm(H)    
9. Operating environment    
Temperature range : 23° ± 1°C    
Relative humidity : 30 % ∼ 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.

 

 

 

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