CMS Series Overview

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CMS Series—Versatile thin film deposition systems for advanced materials research and development

The Chinese Academy of Sciences Institute of Physics uses Kurt J. Lesker CMS-18™ for advanced GMR/TMR research.

Typical Applications

  • R&D Thin Film Deposition

Deposition Techniques Available

  • Magnetron Sputtering (RF, DC, or Pulsed DC)
  • Electron Beam Evaporation

Process Options

  • Symyx® Licensed CMS package
  • Heating
  • Cooling
  • Bias
  • Indexable Magnetic Field
  • Ion Source for Substrate Cleaning/Assisted Deposition


  • Cylindrical 304 stainless steel chamber
  • Chamber top plate assembly with hoist
  • Up to six TORUS® magnetron sputtering sources
  • Turbomolecular or cryogenic pumping
  • Manual touch-screen or computer-controlled process automation
  • Substrate fixture with rotation
  • Substrate load lock
  • Extruded aluminum system support frame


Lesker CMS Series Overview


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