CMS Series Overview

0.0/5 rating (0 votes)

Description

     

 

CMS Series—Versatile thin film deposition systems for advanced materials research and development

The Chinese Academy of Sciences Institute of Physics uses Kurt J. Lesker CMS-18™ for advanced GMR/TMR research.

Typical Applications

  • R&D Thin Film Deposition

Deposition Techniques Available

  • Magnetron Sputtering (RF, DC, or Pulsed DC)
  • Electron Beam Evaporation

Process Options

  • Symyx® Licensed CMS package
  • Heating
  • Cooling
  • Bias
  • Indexable Magnetic Field
  • Ion Source for Substrate Cleaning/Assisted Deposition

Features

  • Cylindrical 304 stainless steel chamber
  • Chamber top plate assembly with hoist
  • Up to six TORUS® magnetron sputtering sources
  • Turbomolecular or cryogenic pumping
  • Manual touch-screen or computer-controlled process automation
  • Substrate fixture with rotation
  • Substrate load lock
  • Extruded aluminum system support frame

 

Lesker CMS Series Overview

 

Share this product

Featured Products

  • 1
  • 2
Prev Next

MTI - Tube Furnace

MTI - Tube Furnace

OTF-1600X-III- is a split-able three-zone tube furnace with Kanthal 1650°C grade SiC heating element,  82mm OD Alumina tube •...

Read more

KDF - 900 Series (PVD)

KDF - 900 Series (PVD)

  The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions. •...

Read more

Copyright © 2012 - 2015 Premier Solutions Pte. Ltd. All Rights Resrved | Address: 100 Tras Street, 100 AM, #16-01, Singapore 079027. Tel: (65)62843818