CMS-18 & CMS-24

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Description

 

Performance-oriented design for advanced university, industrial, and government lab R&D applications.

Features

  • 18" diameter x 15" wide cylindrical chamber (CMS-18™)
  • 24" diameter x 15" wide cylindrical chamber (CMS-24)
  • Available with up to six source ports (standard)
  • Available with up to six TORUS Magnetron Sputtering Sources
  • Available with multi-pocket electron beam evaporation source
  • Accommodates substrates up to 8" (CMS-18 up to 6")
  • Available with 3 cm filamentless ion source

 

Lesker CMS-18 & CMS-24

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