ATOKIT

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Description

 

Kemstream - ATOKIT 

New Injection/Atomization System for SPRAY PYROLYSIS

 

High Performance, Precise, Innovative liquid and solid precursors Injection/Atomization System for pure liquid compounds and solid ones dissolved in a carrier liquid (organic solvent).  

The  ATOKIT is able to handle and atomize most of liquid compounds and solutions from low viscosity to high viscosity ones.

The  ATOKIT achieves a very fine atomization of a pulsed liquid mixed with a carrier gas prior to injection.  

The generated aerosol can be used for  Spray Pyrolysis processes. It can also be easily vaporized to produce reactive gases for the synthesis by ALD and CVD of thin films, nanoparticles and nanoobjects of numerous functional materials such as for instance : dielectrics (low-k and highk), barrier layers (Ta, Ti and Nb nitrides), ferroelectrics, piezoelectrics, metals (Cu, Pt, Ru, Ir, Rh, Ag, Pd,…), IIIV, II-V,  chalcogenides, transparent conductive oxides, photovoltaïcs, low friction coatings, hard coatings and superconductors. 

Because of its unique proprietary way to deliver and atomize the liquid the ATOKIT is the ideal tool to build a real non-contact flash vaporizer therefore generating particle free vapors.

Indeed, the blasting of the carrier gas/liquid mixture allows generating an aerosol of around 10 microns diameter droplets. Such very small droplets can be easily flash vaporized.

The  ATOKIT operates from vacuum to atmospheric pressure. Thanks to delivering of accurate and stable liquid flows, the  TOKIT delivers accurate and stable aerosol flows.

 

 

Premier Solution Pte Ltd / Kemstream - ATOKIT

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