AS-One

0.0/5 rating (0 votes)

Description

Annealsys - AS-One

 

Rapid Thermal Processing (RTP) Cold Wall Chamber Furnaces for 100mm and 150mm Version

 

 

 

 

Applications

 

  • Rapid Thermal Annealing (RTA)
  • Rapid thermal oxidation (RTO)
  • Diffusion, contact annealing
  • Compound semiconductor  annealing
  • Nitridation, Silicidation, Selenization, Sulfurization
  • Crystallization and Densification

 

Specifications

 

  • 4-inch and 6-inch wafer capability
  • Floor standing system for reduced footprint
  • High reliability and low cost of ownership
  • Stainless steel cold wall chamber technology:
  • High process reproducibility
  • Ultra clean and contamination-free environment.
  • High cooling rates and low memory effect
  • A high vacuum version (10-6 mbar) is available
  • Pyrometer and thermocouple control
  • Fast digital PID temperature controller
  • Edge pyrometer viewport insures enhanced temperature control of the susceptor for compound, semiconductors and small samples.

 

Performance & characteristics

 

  • Temperature range: RT to 1500°C
  • Ramp rate up to 200°C/s
  • Cooling rate up to 100°C/s with special equipment
  • Gas mixing capability with mass flow controllers
  • Vacuum range: Atmosphere to 10-6 Torr

 

 

 

 

 

Premier Solutions Pte Ltd / Annealsys - AS-One (Rapid Thermal Processing (RTP), Rapid Thermal Annealing (RTA), Rapid Thermal Oxidation (RTO) 

 

Share this product

Featured Products

  • 1
  • 2
Prev Next

MTI - Tube Furnace

MTI - Tube Furnace

OTF-1600X-III- is a split-able three-zone tube furnace with Kanthal 1650°C grade SiC heating element,  82mm OD Alumina tube •...

Read more

KDF - 900 Series (PVD)

KDF - 900 Series (PVD)

  The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions. •...

Read more

Copyright © 2012 - 2015 Premier Solutions Pte. Ltd. All Rights Resrved | Address: 100 Tras Street, 100 AM, #16-01, Singapore 079027. Tel: (65)62843818