ALD Reactant Delivery Systems (RDS) Designs

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The Kurt J. Lesker Reactant delivery system for ALD 8000 shown with MFCs, valves, and gas lines (top bays) and pumping/LN2 trapping (bottom bays)


  • Designed to cover a wide range of delivery requirements
  • RDS available for solid, liquid, or vapor sources
  • High and low vapor pressure source capabilities
  • Various metering options, including mass flow controllers
  • Bubblers available
  • Computer-controlled heated delivery lines available


Example Gas Delivery Schematics


Lesker ALD Reactant Delivery System (RDS) Designs

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