6~8 Inch Coater & Developer (MSX2000)

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Description

 

SVS Corp - 6~8 Inch Coater & Developer (MSX2000)

          

6~8 Inch Coater & Developer (MSX2000)

Features:

MSX-2000 is one of 6" and 8" Modular Spin Process System by KST.  KST's Modular Spin System provides various process adaptability, flexibility and higher performances.  Major benefits of KST MSX-2000 Spin system:

High Coating/ Develop Performances.

Small Foot Prints.

Low Cost of Ownership.

Easy Operation & Maintenance.

Integrates one spin module for Coat & Develop.

Programmable main spin process, Coating and/or Develop as well as EBR, Back

Rinse, Bowl Cleaning, Bake, etc.

 

General Specification

Coating Uniformity : < 1.0%

Spin RPM : 0 ~ 7000 rpm, max. Accuracy 1.5 rpm

Acceleration : 50,000rpm/sec2

Temp Range : H.P - 50 ~ 150 °C ±0.3 C, 150 ~ 200°C ±1.5 °C, 201 ~ 250°C ±2.5°C

Temp Range : C.P - 17 ~ 30C ±0.3°C

Throughput : > 65wafers, depend upon process

Dimensions : W1550 X D1250 X H2000mm

 

Application

PR Coat & Bake

Develop & Bake

PR Coat & Develop

Spin Scrub & Bake

PIQ Process

SOG Process * PR Coat & Bake

 

Premier Solutions Pte Ltd  / SVS 6~8 Inch Coater & Developer MSX2000

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