500W 13.56MHz RF Generator for 2''-3.14'' (50-80mm) OD Tube Furnace OTF-PECVD-RF

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Description

Item Number: OTF-PECVD-RF

13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.

SPECIFICATIONS

Noise <50 dB
Output Power 5 -500W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic
RF Output Port 50 Ω, N-type, female
Cooling Air cooling
Power 208-240VAC, 50/60Hz
Tube Size 50 - 80 mm (2''-3.14'' OD)  ( larger diameter coil up to 11" diameter is available upon request )
Application Combine with MTI's tube furnace to get PECVD system


Optional
Please order the oiless pump for zero contamination, quartz tubes and vacuum flanges can be ordered by click the pictures below:
Sealing flanges for 40 - 42 mm O.D tube 1



Demo Video

Warranty One year limited warranty with lifetime support

 

 

 

Premier Solutions Pte Ltd / MTI Corporation - 500W 13.56MHz RF Generator for 2''-3.14'' (50-80mm) OD Tube Furnace OTF-PECVD-RF

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