CMT-SR1000N

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Description

4 Point Probe System / Sheet resistance system

 

The CMT-SR1000N is a measurement system for Sheet Resistance and Resistivity of Wafer, LCD, ITO, Solar cell, Fuel cell samples.  Measurement is simply completed by pressing the START BUTTON only, and the measurement value is displayed on the LCD display window of the system.

 

 

 

说明: http://www.edgetech.in/3.jpg

 

1. Features  
Automatic contact system(Center 1 point)  
Automatic range selection    
Data communication port & software    
2. Configuration    
  The system consists of the following components.    
4-point probe head unit    
Z-axis robot arm    
Membrane keyboard panel    
LCD display window    
Data communication port    
Data download Software    
Standard accessories    
  - Power cable 
- Data communication cable 
- Operating & service manual
   
3. Specifications    
Sheet resistance measurement    
  - Measuring method : Contacted by 4-point probe
- Measuring range : 1 mohm/sq ∼ 2 Mohm/sq
- Measuring point : Center 1 point
   
Resistivity measurement    
  - Measuring method : Contacted by 4-point probe (input thickness)
- Measuring range : 10.0 μohm·cm ∼ 200.0 kohm·cm (VLSI standard wafer)
- Measuring point : Center 1 point
Current source    
  - 10nA to 100mA
- DVM 0V to 2,000mV
- Accuracy: 0.2 % 
   
Measurement accuracy    
  - ±0.5 % (standard wafer, when 23°C)    
Four point probe (Jandel Eng.)    
  - Pin spacing : 20 mils ∼ 50 mils
- Pin Load : 10 gram/pin ∼ 250 gram/pin
- Pin radius : 12.5 micron ~ 500 micron
   
Software    
  - Windows 98/XP/NT Version
- Data save & load
- Data printout
- Use RS232C Communication Port
   
4. Specimen    
Circle type (wafer) : max 8"    
Rectangular type : max 140 mm × 140 mm    
5. Measuring time    
Approx. 3 ± 1 sec/point    
6. Software    
Operating personal computer : IBM PC/AT compatible
Connect com port of PC and data com port of CMT-SR1000N
Data save & load    
Data printout    
7. Utility requirements    
Power requirements    
  - Line voltage : AC 110V or 220V ± 10% 
- Electric power : 40 W, 500 mA 
- Line frequency : 60 Hz 
   
8. Outside Dimension    
  254mm(W) × 562mm(D) × 250mm(H)    
9. Operating environment    
Temperature range : 23°± 1°C    
Relative humidity : 30 % ∼ 70 %    
Avoid placing the system near a source of RFI, vibration and sources of gas.
Avoid large changes in temperature.    

 

 

 

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