1700°C Three Zone 60mm Alumina Tube Furnace with Three Channel Gas Mixer, Vacuum* System, and Anti-Corrosive Vacuum Gauge - GSL-1700X-60-III-F3LV

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Description

Item Number: GSL-1700X-F3LV

 

GSL-1700X-60-III-F3LV  is a CE certified three zones tube furnace with 60mm dia. alumina tube, mechanical vacuum pump and three channels gas flowing system, which can heat sample to 1700°C and achieve vacuum degree up to 5x10^-2 torr and mix 1- 3  type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.

SPECIFICATIONS

Furnace Structure
  • Double layer steel casing with air cooling. Two cooling fan inside to keep temperature of outside case < 55oC.
  • High purity fibrous alumina insulation for Max, energy saving.
  • Three indepentent heating zone via three pricesion temperature controllers.
  • Click picture on left to review detail specification
Power Consumption
9 KW
Input Voltage
AC 208-240V Single Phase, 50/60 Hz (75A air breaker required)
Heating Zone

Three zones: total 25" (630 mm) heating zone (included two refractory separators)

  • Zone 1: 7.5" (190 mm) heated by 4 pcs U type SiC
    • Working temperature  800 - 1400°C
    • Heating rate: 10°C/min
  • Zone 2: 10" (250 mm) heated by 6 pcs U type MoSi2
    • Working temperature 800 - 1700°C
    • Max. Heating rate: 5°C/min
  • Zone 3: 7.5" (190 mm) heated by 4 pcs U type SiC
    • Working temperature  800 - 1400°C
    • Max. Heating rate:  10° C/min

Tube Size and Flange

  • 99.8% purity Alumina Tube
  • 2-3/8" ( 60mm) O.D.x 2-1/8"I.D. (54mm) x 48" (1200mm) Length
  • 60 mm stainless steel vacuum sealing flange with valve and meter is included
  • Two porous ceramic blocks are included for protecting flange from heating radiation
Temperature Controller
  • Three precision temperature controllers to control three zones separately.
  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:
    • The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at extra cost.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.


Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Vacuum Pump
  • Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed inside the vacuum station. Vacuum system can reach 5x10^-2 torr within 30 minutes of pumping. ( 220V is available for outside USA)
  • One KFD25 adaptor is installed to flange for connecting to vacuum pump.
  • Stainless steel pipe ( 25mm Dia x 1000mm length ) is included for connecting to tube furnace with KFD25 adaptor and clamps.
     
Three Channel Gas Mixing and Delivery System
  • Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case which are able to monitor gases flowing rate (three different kinds of gases in total)  clcik picture on left to see detail specs
1) Compact direct read flow meter, 10-100 cc/min.
2) Compact direct read flow meter, 16-160 cc/min.
3)  Compact direct read flow meter, 25-250 cc/min.
  • One pressure meters is installed inside mobile cart which are able to monitor the pressure of mixing tank.
  • 4 stainless steel needle valves are installed on the mobile cart
  • Two gas flowing pipes are provided for immediately use (one pipe from two mixed gases and another is independent gas)
  • Optional: in order to control gas delivery accurately, you may choose three channel gas delivery system controlled by precision digital mass flow meter at extra cost.  Click picture below to see detail specs
Power Cable & Plug
  • 10 feet length 8-3 AWG heavy duty UL approved power cable is included
  • Extra length cable can be ordered by clicking picture on left
  • Plug is not included,you can order from your local hardware store according to female plug in your lab
Dimensions
  • Furnace:   863 L x 457 W x 711 H mm (34 L x 18 W x 28 H  inch)
  • Gas cart:  850 mm (L) x 600 mm  (W) x 700 mm ( H)
Net Weight
150Kg (furnace) + 100Kg  ( total  550lb)
Shipping Weight
800 lbs
Shipping Dimensions
Two cases in one pallet: 45x45x35/case
Warranty
One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance
  • Furnace:   CE Certified.   (CSA certificate is available upon at extra cost )
  • Transformer is UL certified
  • Temperature controller us Met and CE certified
Application Notes
Operation Instructions

 

 

 

Premier Solutions Pte Ltd / MTI Corporation - 1700°C Three Zone 60mm Alumina Tube Furnace with Three Channel Gas Mixer, Vacuum* System, and Anti-Corrosive Vacuum Gauge - GSL-1700X-60-III-F3LV

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