1700°C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive Vacuum Gauge - GSL-1700X-F3LV series

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Item Number: GSL-1700X-F3LV


GSL-1700X-F3LV series tube furnace is a CE certified  alumina tube furnace with mechanical vacuum pump and three channels gas flowing system, which can heat sample to 1700°C and achieve vacuum degree up to 5x10-2 torr and mix 1- 3  type of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases


Tube Furnace Structure
  • Double layer steel casing with air cooling. Two cooling fan inside to keep temperature of outside case < 55°C.
  • High purity fibrous alumina insulation for Max, energy saving.
Power Consumption 5kW Max.
Input Voltage AC 208~240V, Single Phase, 50/60Hz
Max. Heating Temp. 1700°C
Max. Heating Rate 5°C/min
Max. Cooling Rate 5°C/min
Heating Zone Length 455mm (18")
Constant Temp. Zone 150(+/-1C)
Temperature Accuracy +/-1°C
Temperature Controller
  • PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
  • 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Please click here to learn why SCR is more accurate than SSC (Solid state relay).
  • Built in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:
    • The furnace may be operated by PC by installing three control modules. Please order the MTS-02 control modules at extra cost.
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.

Heating Elements 1800 grade MoSi2   ( 8 pcs )
Tube Materials and Size
  • 99.8% high purity Al2O3 ceramic tube
  • ID: 72mm x  OD: 80 mm   x 1000 mm length.
Digital Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases.
  • Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr).
Vacuum Sealing
  • Two stainless steel flanges with digital vacuum gauge and valves is included.
  • Vacuum pressure can reach 5x10-2 torr via mechanical pump.
  • The leaking rate is 6 mtorr/min in max. and 2 in stable, click the picture. below to get details chart and data measured by CE certificated digital vacuum meter:

(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)
Vacuum Pump and fittings Vacuum Pump
Fittings The standard vacuum fittings include:
  • A pair of stainless steel vacuum flange with KF-25 pump connector, two needle valves and one 1/4" swagelok tube connector.
  • A 1000mm long KF-25 stainless steel vacuum bellows
  • Four KF-25 quick clamps
Gas Flow Meter
  • Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case provide monitor to gas flowing rates.
    • 1) Compact direct read flow meter, 10-100 cc/min.
    • 2) Compact direct read flow meter, 16-160 cc/min.
    • 3) Compact direct read flow meter, 25-250 cc/min.
  • One pressure meter is installed inside mobile cart for monitoring the pressure of the mixed gas.
  • Four stainless steel needle valve are installed in the front panel to control the gas route independently.
Front Panel Back Panel Gas Routes
Shipping Info Product Dimensions
  • 80 & 100mm O.D Tube Furnace:    550 x 500 x 700mm L x W x H
  • Gas Mix Station: 600 x 600 x 700mm
  • Vacuum station: 600 x 600 x 700mm
New weight 450 lb (in total)
Shipping Dimensions Two cases in one pallet: 45 x 45 x 35"/ea. case
Shipping Weight 500 lb (in total)
Warranty One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements 
are not covered by the warranty, please order the replacement at related products below.) 
Certificate CE Certified
Application Notes
Operation Instructions




Premier Solutions Pte Ltd / MTI Corporation - 1700°C Single Zone Alumina Tube Furnace with 3 Channel Gas Mixer, Vacuum Station, and Anti-Corrosive Vacuum Gauge - GSL-1700X-F3LV series

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