1700°C 80mm Dia Tube Furnace (1700C Max.) with Molecular Pump & 9 Channel Gas Mixing System - GSL-1700X-80-HVC9

0.0/5 rating (0 votes)

Description

Item Number: GSL-1700X-80-HVC9

GSL-1700X-80-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.

Specifications:


 
Furnace Structure

  • Double layer steel casing with air cooling.
  • Two cooling fans inside to keep  case temperature < 55oC.
  • High purity Alumina refractory chamber
  • Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.
  • Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
Power

6 Kw

Voltage

AC 208-240V Single Phase, 50/60 Hz

Heating Element 8 pcs 1800oC grade MoSi2 heating element

Max. Temperature

1700 oC (< 1 hours )

Continuous Temperature

1600 oC

Max. Heating Rate

<= 5  oC /min

Tube Size and Materials

  • Premier Grade alumina tube made in USA.

  • ID: 82 mm x OD: 73 mm x 1000 mm length.

  • Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).

Heating Zone

  • Heating zone length: 457 mm (18")

  • Constant Temperature Zone length: 150 mm (6")(+/-1oC)

Temperature controllers
  • One precision digital temperature controller programmable with 50 segments.

  • PID adjustable with auto tune function to ensure temperature stability within  +/- 1 oC.

  • Full protection in each controller for over-temperature and broken thermal couple.

Thermal Couple

B type thermal couples built in

Vacuum Flanges

 

  • Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.
  • Double high temperature silicone O-ring for using under 300oC.
  • Porous alumina blocks included for protecting flange from heat radiation.

Vacuum pumps

Tow stages vacuum pump installed in bottom case:

Vacuum Sensor & display

  • Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.

  • Vacuum controller and display are installed in bottom mobile cart.

Gas flow meter

User Manual (Click to download)
  • 9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-100% of full scale)
    • 3 MFC at range 0 - 1000scc
    • 3 MFC at range 0 - 200scc
    • 3 MFC at range 0 - 10 scc
    • one floating meter will be installed for N2 gas only
  • one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
  • 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
Software and interface (optional at extra cost). Please click uderline for software operation instruction
Pipe connection,  valves and gas mixer

  • SS 316 1/4" pipe/fitting
  • SS 316 vacuum needle valves
  • 21 sets of stainless steel vacuum valves are installed outside of  right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
  • Please click here to seesketch of pipe connection.

Dimension

Furnace: 550 x 380 x 520  Bottom Mobile case: 600x600x597

Net Weight

about 100 kg

Shipping weight

200 Lbs

Shipping package size after crating

Two cases in one plastic pallet: 45x45x35/case

Warranty

  • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
Compliance Furnce:          CE certified . 
CSA certificate is available upon at extra cost
Components:   Temperature controller and Transformer are UL or Met certified.  

Warning

The tube furnaces with alumina tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)

Operation Manual Download Catalog    About shipping / Handling Quick test instruction

 

 

 

 

Premier Solutions Pte Ltd / MTI Corporation - 1700°C 80mm Dia Tube Furnace (1700C Max.) with Molecular Pump & 9 Channel Gas Mixing System - GSL-1700X-80-HVC9

 

Share this product

Featured Products

  • 1
  • 2
Prev Next

MTI - Tube Furnace

MTI - Tube Furnace

OTF-1600X-III- is a split-able three-zone tube furnace with Kanthal 1650°C grade SiC heating element,  82mm OD Alumina tube •...

Read more

KDF - 900 Series (PVD)

KDF - 900 Series (PVD)

  The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions. •...

Read more

Copyright © 2012 - 2015 Premier Solutions Pte. Ltd. All Rights Resrved | Address: 100 Tras Street, 100 AM, #16-01, Singapore 079027. Tel: (65)62843818