1700°C 4 " Tube Furnace with High Vacuum System (10^-5Torr) and (2-4 chs optional) MFC Gas Mixer - GSL-1700X-4-HVC

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Description

Item Number: GSL-1700X-4-HVC

GSL-1600X-4-HVC2 is CE certified 4" diameter single zone alumina tube furnace with high vacuum pump system (up to 10-5 torr) and 2 channel precision digital Mass flow-controllers, which can control two types of gases for CVD or diffusion and work up to 1600ºC.

Specifications

GSL-1700X series tube furnace Casing Double layer steel casing with air cooling. 
Two cooling fans inside to keep  case temperature < 55°C.
High purity Alumina refractory chamber
Vacuum and gas mixing system is located in bottom Mobile cart with 4 wheel.
Vacuum flange, gauge, valves, pipe and high vacuum pump are included for immediate use.
Processing Tube Material: Fused quartz tube
One processing tube is included with the furnace. 
4.1 "OD x 3.625 " ID x 40 " L Alumina Ceramic Tube (99.8%)
Power 6KW
Rated Voltage AC 208-240V Single phase, 50/60Hz
Heating Element 8 pcs 1800°C grade MoSi2 heating element
Working Temp. Max. Heating Temp.: 1650°C
Continuous Working Temp.: 1600°C
Heat-up Rate  <=5°C/min 
Heating Zone Length Heating zone length: 457 mm (18")
Constant Temperature Zone length: 150 mm (6")(+/-1°C)
Temp. Control PID automatic control via current limiting phase angle fired the resistor with 30 steps programmable segments.
Temperature accuracy: ±1°C
Thermocouple: B type built inside the furnace
Vacuum Seal One pair of stainless steel vacuum flange with:
- one digital vacuum gauge
- two needle valves 
- one KF-25 connector  and KF-25 to KF-40 adapter for the high vacuum station.
- one 1/4" Swagelok tube connector
Dimension 550 x 380 x 520
High Vacuum Station Power 100~110W
Rated Voltage AC 208-240V Single Phase, 50/60Hz
Dimension 600(L) x 600(W) x 700(H), mm
Structure Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel :   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included
Control Panel One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self protection - the system will protect the pump from damage by overheating and over-current if the leaking rate of the reaction chamber is too high to achieve high vacuum. 
LCD screen - double lines parameters checking interface make the working easier to be handled.
     
Self testing Spinning up      
Volume Flow Rate Nitrogen   N2     33 L/s
Helium      He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )
Mass Flow Gas Control Structure
Made of 316 stainless steel
Gas mixing tank: Φ80X120mm  
Dimension: 600(L) x 600(W) x 700(H), mm

Three Channels MFC control panel (Click to enlarge)

The flow rate control range and number of gas routes are available for customization. Please contact us for detail information.
Power 18W per channel
Rated Voltage AC 208-240V, Single phase, 50/60Hz
Gas routes Please select the number of gas routes in the option bar to update the price
Warranty  One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
Shipping Dimensions Two cases in one plastic pallet: 45x45x35/case 
Warning The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
Operation Instructions

 

 

 

Premier Solutions Pte Ltd / MTI Corporation - 1700°C 4 " Tube Furnace with High Vacuum System (10^-5Torr) and (2-4 chs optional) MFC Gas Mixer - GSL-1700X-4-HVC

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