1200°C Max. 4" Tube Furnace with Sliding Flange for DIY CVD System - OTF-1200X-4-SF-UL

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Product Number: OTF-1200X-4-SF


OTF-1200X-4-SF is a compact 4" ID quartz tube furnace with slide-able flange with 1200°C Max. working temperature, which is designed for customers to build a DIY CVD system easily. 



Furnace Structure
Rated Voltage Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug)
Power Consumption Max. 3600 W (20 A breaker required)

Heating Zone
  • Heating zone length:  440 mm
  • Constant temperature zone: 100 mm 

Working Temperature
  • Max heating temperature: 1200°C ( < 30 minutes )
  • Continuous working temperature: 200~1100°C
  • Max heating & cooling rate: 20°C/min

Temperature Control
  • Digital controller with PID/self-tuning function and 30 segments programmable
  • Thermocouple: K type thermocouple, which is inserted from the right side flange and connected to temperature controller.
  • Control accuracy: +/- 1°C
  • Software for PC control furnace is available as optional (click picture below to order)
  • The new version of PC module is now compatible with Lab View 05/08/2014

Vacuum and Gas Sealing & Flange
  • Right flange:
    • Water cooling structure with 12mm quick connector to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)
    • KF25 vacuum fitting (to vacuum pump, please click to order pump,  vacuum hose, valve and sealing gasket)
    • Slidable for customer to easily and fast push/pull in/out sample
    • One quartz wafer holder ( 3"dia. max.  ) is built in the flange with heating radiation block for CVD growth on thin substrate
    • An anti-corrosive capacitance diaphragm gauge is included
  • Left flange with four 1/8'' Swagelok fittings for 1/8'' gas tube:
    • Two separate 1/8'' fitting on the flange for any gas into the CVD furnace 
    •  and customized feedthrough is available upon request.
Net weight 100kg
  • Standard:    48"L X 18"W X 23"H
  • Maximum:   66"L X 18"W X 32"H  (Lid open and right-side flange slided out)

  • One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and etc. are not covered by the warranty)
  • You may order replacement quartz tube here: EQ-QZTube-RTP
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass UL(UL61010), CSA or TUV certification on customer side at extra cost. ( please click marks below to learn details )
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure <0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Please click here to learn how to install the gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
Operation Instructions




PREMIER SOLUTIONS PTE LTD / MTI CORPORATION - 1200°C Max. 4" Tube Furnace with Sliding Flange for DIY CVD System - OTF-1200X-4-SF-UL

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